Micron-sized subwavelength structured photonic sensors could allow critical thermo-mechanical phenomena in manufacturing processes to be monitored, while offering opportunities for fundamental understanding and better control of manufacturing processes. To implement these novel sensors into real manufacturing processes, the micro photonic sensors can be embedded at critical locations in metallic structures, which are still heavily used in hostile manufacturing environments. This paper presents the study of design, fabrication, and testing of integrated microring sensors. Various thin film optical materials were studied. Single ring resonators were designed. A new approach to fabricate metal embedded microring sensors was developed. Sensors fabricated on silicon wafers were tested and the Q factor was measured to be around 2000, the free spectrum range (FSR) was about 5 nm. Preliminary results of metal embedded sensors are also presented.
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ASME 2007 International Manufacturing Science and Engineering Conference
October 15–18, 2007
Atlanta, Georgia, USA
Conference Sponsors:
- Manufacturing Division
ISBN:
0-7918-4290-8
PROCEEDINGS PAPER
Design and Fabrication of Micro Photonic Sensors for Manufacturing
Xugang Zhang
,
Xugang Zhang
University of Wisconsin - Madison, Madison, WI
Search for other works by this author on:
Xiaochun Li
Xiaochun Li
University of Wisconsin - Madison, Madison, WI
Search for other works by this author on:
Xugang Zhang
University of Wisconsin - Madison, Madison, WI
Xiaochun Li
University of Wisconsin - Madison, Madison, WI
Paper No:
MSEC2007-31163, pp. 395-400; 6 pages
Published Online:
March 24, 2009
Citation
Zhang, X, & Li, X. "Design and Fabrication of Micro Photonic Sensors for Manufacturing." Proceedings of the ASME 2007 International Manufacturing Science and Engineering Conference. ASME 2007 International Manufacturing Science and Engineering Conference. Atlanta, Georgia, USA. October 15–18, 2007. pp. 395-400. ASME. https://doi.org/10.1115/MSEC2007-31163
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