In order to investigate and understand the complicated transient thermal phenomena in laser micro processing, it is essential to accurately measure time-resolved temperatures of the workpiece. Micro thin film thermocouples with a micrometer spatial and nanosecond temporal resolution were fabricated on electroplated nickel workpieces to measure transient surface temperatures in nanosecond pulsed laser micromachining by ablation. Transient temperatures were successfully measured, and the effect of laser energy fluences on the peak temperatures was experimentally investigated. This study demonstrates that the micro TFTCs can be useful in measuring the transient temperatures on the workpiece during laser micromachining, and the measured data can be utilized to validate and improve existing analytical and numerical models.

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