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Keywords: raman
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Proceedings Papers
Thermoelectric Properties of Stressed P-Doped Polycrystalline Silicon Hollow Nanotubes
Available to PurchaseJose Manuel Sojo-Gordillo, Yashpreet Kaur, Mercè Pacios-Pujadó, Giulio de Vito, Saeko Tachikawa, Alex Morata, Ilaria Zardo
Proc. ASME. MNHMT2024, ASME 2024 7th International Conference on Micro/Nanoscale Heat and Mass Transfer, V001T12A001, August 5–7, 2024
Publisher: American Society of Mechanical Engineers
Paper No: MNHMT2024-132609
... of the polycrystalline silicon and the SiO2 layers. Raman spectroscopy revealed the partially amorphous nature of the film and showed an intrinsic tensile stress of ~500 MPa in the polycrystalline layer. Finally, electrothermal measurements using microfabricated suspended nitride membranes were carried out...
