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Keywords: Micromirror
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Proceedings Papers

Proc. ASME. MNHMT2009, ASME 2009 Second International Conference on Micro/Nanoscale Heat and Mass Transfer, Volume 2, 373-375, December 18–21, 2009
Paper No: MNHMT2009-18038
... A twisting-type micromirror that can be driven by two thermal bimorph actuators bending in opposite directions is designed from electro-thermo-mechanical theories and fabricated through a simple MEMS process. Each actuator consists of SiO 2 and gold thin-film layers. A simplified analytical...