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Keywords: Bimorph Thermal Actuator
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Proceedings Papers

Proc. ASME. MNHMT2009, ASME 2009 Second International Conference on Micro/Nanoscale Heat and Mass Transfer, Volume 2, 373-375, December 18–21, 2009
Paper No: MNHMT2009-18038
... model has been built to optimize the performance of micromirrors. Operation of the actuation system agrees well with predictions from theoretical models and simulations using a commercial code. Micromirror Bimorph Thermal Actuator Twisting actuation MEMS Fabrication 1 Copyright © 2009...