This paper describes a novel measurement technique for three dimensional shape of micro droplet utilizing micro LIF (Laser Induced Fluorescence) technique. A measurement system consisted of microscope equipped with 10x lens, high sensitive CCD camera, CW Nd:YAG laser, optical filters and so on. Calibration curve between thickness of micro droplet and emission of fluorescence dye solution was obtained by the use of the PDMS (polydimethylsiloxane) microchip, whose depth varied from 8 to 120 μm fabricated using photo lithography technique. The microchip based calibration method provides high measurement accuracy and eliminate photobreaching effect. Measurement accuracy of the present method in depth direction was about 2 μm assessed using laser displace meter and the spatial resolution in the x-y plane became 6.7 μm. The technique is useful to investigate a two phase flow in micro scale.

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