Study of Heat Transfer in Microsystems by Infrared Technique

The problem of dissipating high heat fluxes has received much attention due to its importance in such applications as cooling of electronic equipment, micro heat exchangers and many others. The most effective way of cooling is pumping liquid inside these devices through microchannels or porous media. Advantages and disadvantages using the Infrared Technique for the study of the heat transfer in microsystems are analyzed. The generalized model for analysis using IR technique for the temperature measurement in microdevices is suggested. The model is illustrated by various examples of heat transfer determination using image analysis as the heater temperature as well direct measurement of the liquid temperature.