It has been proposed that the use of superlattice structure is effective for reduction of lattice thermal conductivity in the direction perpendicular to superlattice interfaces which can lead to improvement of figure of merit. In this work, we have evaluated the thermal conductivity of Si/SiGe superlattice structure films by theoretical analysis and experimental studies. In experiments, the ultra-high vacuum chemical vapor deposition (UHVCVD) has been employed to formation the Si/Si0.71Ge0.29 superlattice film. The cross-plane thermal conductivity of a Si/Si0.71Ge0.29 superlattice is measured based on the 3 ω method. In theoretical analysis, we use the Boltzmann transport equation to analyze the phenon transport in superlattice film. We compared the thermal conductivities of several Si/Si0.71Ge0.29 superlattice structure films by changing the thickness of Si and Si0.71Ge0.29. The results indicate that increasing the period (one layer Si and one layer Si0.71Ge0.29) length will lead to increase acoustic mismatch between the adjacent layers, and hence increased interfacial thermal resistance. However, if the total thickness of the superlattice film is fixed, reducing the period length will lead to decreased effective thermal conductivity due to the increased number of interfaces.
Skip Nav Destination
Close
Sign In or Register for Account
ASME 2008 First International Conference on Micro/Nanoscale Heat Transfer
June 6–9, 2008
Tainan, Taiwan
Conference Sponsors:
- Nanotechnology Institute
ISBN:
0-7918-4292-4
PROCEEDINGS PAPER
Thermal Conductivity of Si/SiGe Superlattice Film
Chun-Kai Liu
,
Chun-Kai Liu
Industrial Technology Research Institute, Hsinchu, Taiwan
Search for other works by this author on:
Heng-Chieh Chien
,
Heng-Chieh Chien
Industrial Technology Research Institute, Hsinchu, Taiwan
Search for other works by this author on:
Ming-Ji Dai
,
Ming-Ji Dai
Industrial Technology Research Institute, Hsinchu, Taiwan
Search for other works by this author on:
Chih-Kuang Yu
,
Chih-Kuang Yu
Industrial Technology Research Institute, Hsinchu, Taiwan
Search for other works by this author on:
Chun-Yeh Hsu
,
Chun-Yeh Hsu
Industrial Technology Research Institute, Hsinchu, Taiwan
Search for other works by this author on:
Mei-Jiau Huang
,
Mei-Jiau Huang
National Taiwan University, Taipei, Taiwan
Search for other works by this author on:
Guang-Li Luo
Guang-Li Luo
National Nano Device Laboratories, Hsinchu, Taiwan
Search for other works by this author on:
Chun-Kai Liu
Industrial Technology Research Institute, Hsinchu, Taiwan
Heng-Chieh Chien
Industrial Technology Research Institute, Hsinchu, Taiwan
Ming-Ji Dai
Industrial Technology Research Institute, Hsinchu, Taiwan
Chih-Kuang Yu
Industrial Technology Research Institute, Hsinchu, Taiwan
Chun-Yeh Hsu
Industrial Technology Research Institute, Hsinchu, Taiwan
Mei-Jiau Huang
National Taiwan University, Taipei, Taiwan
Guang-Li Luo
National Nano Device Laboratories, Hsinchu, Taiwan
Paper No:
MNHT2008-52183, pp. 365-369; 5 pages
Published Online:
June 22, 2009
Citation
Liu, C, Chien, H, Dai, M, Yu, C, Hsu, C, Huang, M, & Luo, G. "Thermal Conductivity of Si/SiGe Superlattice Film." Proceedings of the ASME 2008 First International Conference on Micro/Nanoscale Heat Transfer. ASME 2008 First International Conference on Micro/Nanoscale Heat Transfer, Parts A and B. Tainan, Taiwan. June 6–9, 2008. pp. 365-369. ASME. https://doi.org/10.1115/MNHT2008-52183
Download citation file:
- Ris (Zotero)
- Reference Manager
- EasyBib
- Bookends
- Mendeley
- Papers
- EndNote
- RefWorks
- BibTex
- ProCite
- Medlars
Close
Sign In
4
Views
0
Citations
Related Proceedings Papers
Related Articles
Tuning Phonon Transport: From Interfaces to Nanostructures
J. Heat Transfer (June,2013)
Effect of Phonon Dispersion on Thermal Conduction Across Si/Ge Interfaces
J. Heat Transfer (December,2011)
Interface and Strain Effects on the Thermal Conductivity of Heterostructures: A Molecular Dynamics Study
J. Heat Transfer (October,2002)
Related Chapters
PVDF/CO 3 O 4 Nanocomposites: Porosity, Crystallinity and Conductivity
International Conference on Advanced Computer Theory and Engineering, 4th (ICACTE 2011)
Determination of Hydrogen Evolution from Uranium by Thermal Conductivity
International Hydrogen Conference (IHC 2012): Hydrogen-Materials Interactions
Discussion of Parameters to Be Monitored
Consensus on Operating Practices for the Sampling and Monitoring of Feedwater and Boiler Water Chemistry in Modern Industrial Boilers (CRTD-81)