Thermal Sensing Atomic Force Microscope (TSAFM) systems utilize heat transfer in continuum and low-speed rarefied gas flow regimes to perform topological surface scans. Spanning flow regimes complicates the modeling required to analyze scan data. In this paper we present a hybrid Octant Flux Splitting IP-DSMC/BEM model of the steady state heat transfer from a TSFAM cantilever and compare with the uncorrected continuum solution as well as a macro model developed for this problem.

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