Whispering-Gallery mode based optical micro-devices have been demonstrated to have extremely high sensitivity to changes in local temperature owing to their high quality factors and frequency-based measurements. In this paper, we first examine different fabrication techniques for integrating whispering-gallery mode sensors directly onto heating components to realize on-chip in-situ dynamic temperature measurements and monitoring. The merits and drawbacks of each fabrication technique are discussed. Then, the capability of the fabricated on-chip micro-sensors to perform precise real-time thermal measurements was tested, and the findings are discussed. Finally, the advantages of such on-chip sensors are established through heat transfer analysis.
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ASME 2013 4th International Conference on Micro/Nanoscale Heat and Mass Transfer
December 11–14, 2013
Hong Kong, China
Conference Sponsors:
- Heat Transfer Division
ISBN:
978-0-7918-5615-4
PROCEEDINGS PAPER
Fine Temperature Measurement and Fabrication of On-Chip Whispering-Gallery Mode Micro-Sensors
Matthew Frenkel,
Matthew Frenkel
Rutgers University, Piscataway, NJ
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Marlon Avellan,
Marlon Avellan
Rutgers University, Piscataway, NJ
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Zhixiong Guo
Zhixiong Guo
Rutgers University, Piscataway, NJ
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Matthew Frenkel
Rutgers University, Piscataway, NJ
Marlon Avellan
Rutgers University, Piscataway, NJ
Zhixiong Guo
Rutgers University, Piscataway, NJ
Paper No:
MNHMT2013-22003, V001T09A001; 7 pages
Published Online:
February 26, 2014
Citation
Frenkel, M, Avellan, M, & Guo, Z. "Fine Temperature Measurement and Fabrication of On-Chip Whispering-Gallery Mode Micro-Sensors." Proceedings of the ASME 2013 4th International Conference on Micro/Nanoscale Heat and Mass Transfer. ASME 2013 4th International Conference on Micro/Nanoscale Heat and Mass Transfer. Hong Kong, China. December 11–14, 2013. V001T09A001. ASME. https://doi.org/10.1115/MNHMT2013-22003
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