The heat transfer during spray cooling was studied experimentally using deionized water to investigate the spray characteristics and the differences between spray cooling on a smooth silicon surface and nano- and hybrid micro/nano-structured surfaces. The spray cooling experiments show that the heat transfer rates were best for the nano-structured surface, followed by the smooth surface coated with the SiO2 film and the pure silicon surface since the contact angle was smallest on the nano-structured surface and increased on the other two surfaces. The Critical Heat Flux (CHF) was largest for the 25G×25S surface coated with four Carbon Nano Tube (CNT) films with a 75.3% increase over the smooth surface.

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