A twisting-type micromirror that can be driven by two thermal bimorph actuators bending in opposite directions is designed from electro-thermo-mechanical theories and fabricated through a simple MEMS process. Each actuator consists of SiO2 and gold thin-film layers. A simplified analytical model has been built to optimize the performance of micromirrors. Operation of the actuation system agrees well with predictions from theoretical models and simulations using a commercial code.

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