We carried out MD simulations of glancing angle deposition on a high temperature substrate (HT-GLAD) to elucidate the mechanism of whisker growth, assuming Lennard-Jones model potential. The deposit shape depends on the vapor velocity, the vapor density, and the deposition angle. Through analyses of the crystalline structure and the temperature distribution inside the deposit during the whisker growth, it is found that heat transfer from the deposit to the substrate strongly affects the growth dynamics.

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