A dynamic micropumping device has been developed, which is based on acoustic streaming generated by a piezoelectric microtransducer actuated in d31 mode without any check valve. Piezoelectric microtransducers immersed in liquid (water) are used as actuators due to some of their unique properties such as lower noise generation and ease of miniaturization. Quantitative results of maximum local velocity are presented for different tip configuration of the same actuator for comparison. In addition, this work also demonstrates the quantitative measures of the pumping performance such as the pressure head generated as a function of different relevant parameters such as applied electrical field, AC frequency and length of the actuator.
- Nanotechnology Institute
A Piezoelectric Micropumping Device
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Ali, MY, Kuang, C, Khan, J, & Wang, G. "A Piezoelectric Micropumping Device." Proceedings of the ASME 2009 Second International Conference on Micro/Nanoscale Heat and Mass Transfer. ASME 2009 Second International Conference on Micro/Nanoscale Heat and Mass Transfer, Volume 1. Shanghai, China. December 18–21, 2009. pp. 319-327. ASME. https://doi.org/10.1115/MNHMT2009-18512
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