Gas flow over a micro cylinder is simulated using both a compressible Navier-Stokes solver and a hybrid continuum/particle approach. The micro cylinder flow has low Reynolds number because of the small length scale and the low speed, which also indicates that the rarefied gas effect exists in the flow. A cylinder having a diameter of 20 microns is simulated under several flow conditions where the Reynolds number ranges from 2 to 50 and the Mach number varies from 0.1 to 0.8. It is found that the low Reynolds number flow can be compressible even when the Mach number is less than 0.3, and the drag coefficient of the cylinder increases when the Reynolds number decreases. The compressible effect will increase the pressure drag coefficient although the friction coefficient remains nearly unchanged. The rarefied gas effect will reduce both the friction and pressure drag coefficients, and the vortex in the flow may be shrunk or even disappear.

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