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Keywords: water contact angle
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Proceedings Papers

Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 65-67, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70144
... substrate temperature, and SiH4 flow rates were controlled at 20 W, 1 Torr, 250 °C, and 85 sccm, respectively. After a-Si cro-electro-mechanical systems (MEMS) due to the ace area-to-volume ratio of the MEMS structures [1, e wettability, reflected by water contact angle (WCA) face, strongly affects...
Proceedings Papers

Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 631-633, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70143
... superhydrophilic property. The water contact angle (WCA) of the textured glass surfaces became less than 5° in 0.5 second immediately after the AIC of a-process and remained less than 10° in 1 second even after the samples were stored in air for 192 hours. superhydrophilic water contact angle nano-texture...
Proceedings Papers

Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 1537-1539, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21558
... to the large surface area-to- ratio of the MEMS structures [1-2]. These issues can viated by either increasing surface roughness or ng surface hydrophobicity through applying low energy materials to MEMS structure surfaces [1, 3-4]. een reported that the largest water contact angle (WCA) ically modified smooth...