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Keywords: silicon micro spring
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Proceedings Papers

Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 535-538, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21414
.... The constant of silicon micro spring and natural frequency is calculated by using the numerical simulator (ANSYS 8.0) of finite element method. Because the design of the sensor integrates a Fresnel diffraction lens, the optical throughput is high, which brings the advantage of higher signal-to-noise ratio...