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Keywords: resistivity
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Proceedings Papers

Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 619-622, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70132
... 11 06 2009 This paper mainly discusses DC electroplating process parameter, especially the current density, affects the electroplating result (such as copper grain, surface smooth, resistivity). A positive relationship has been found between the current density...