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Keywords: optical fiber
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Proceedings Papers

Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 535-538, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21414
...) Fresnel diffraction micro-lens silicon micro spring acceleration sensor optical fiber Proceedings of MNC2007 MicroNanoChina07 January 10-13, 2007, Sanya, Hainan, China MNC2007-21414 1 Copyright © 2007 by ASME fabrication and experiments show that the principle of this new MEMS optical acceleration...