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Keywords: microelectromechanical system (MEMS)
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Proceedings Papers
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 505-512, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21349
... bulk micromachining microelectromechanical system (MEMS) nanoelectromechanical system (NEMS) inertia technology high resolution inductively coupled plasma il Proceedings of MNC2007 MicroNanoChina07 January 10-13, 2007, Sanya, Hainan, China MNC2007-21349 etching followed by a maskless wet...
