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Keywords: micro-flat electrodeClose
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 1519-1522, January 10–13, 2007
Paper No: MNC2007-21521
... metal plate to form a through slit. Then the rod electrode is moved perpendicularly to the slit, off set from the center of the slit with certain distance. Micro flat electrode is obtained after the raw rod electrode is fed into the plate in the axial direction of the rod. Micro slits are achieved by...