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Keywords: micro electro mechanical systems (MEMS)
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Proceedings Papers

Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 539-542, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21415
... of microneedles fabricated in this paper is enough to pierce human skin. micro electro mechanical systems (MEMS) microneedle deep X-ray lithography drug delivery finite element method (FEM) L n 0 m th e K m e 1 to d m tr u w become a useful tool for medical examinations and drug delivery...
Proceedings Papers

Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 535-538, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21414
... with respect to photon noise. The design of the sensor is well suitable for mass production with normal process of MEMS a low cost. The proof-of-Principle fabrication and experiments show that the principle of this new MEMS optical acceleration sensor is correct. micro electro mechanical systems (MEMS...