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Keywords: hydrophobic
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Proceedings Papers

Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 65-67, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70144
... the adhesion and friction ces of a surface. Improving surface hydrophobicity ce adhesion and friction forces between contacting 2]. A variety of chemicals, including self-assembled rs (SAMs) and molecularly thin lubricants, have been odify smooth silicon surfaces to increase the WCA cing surface wettability [3...
Proceedings Papers

Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 1537-1539, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21558
... to the large surface area-to- ratio of the MEMS structures [1-2]. These issues can viated by either increasing surface roughness or ng surface hydrophobicity through applying low energy materials to MEMS structure surfaces [1, 3-4]. een reported that the largest water contact angle (WCA) ically modified smooth...