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Keywords: electrostatic force
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Proceedings Papers
The Mechanism and Bonding Process of Field-Assisted Bonding of Borosilicate Glass to Kovar Alloy
Available to Purchase
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 475-480, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21278
.... In the bonding process, the Na + depletion zone, which gives birth to a electrostatic force is yielded in the glass. Due to the electrostatic force, the glass contacts with the Kovar alloy intimately. A model is built to analyze the dominant factor of the electrostatic force. Temperature, roughness...
