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Keywords: electrode wear compensating
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Proceedings Papers

Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 1383-1387, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21271
...-time electrode wear compensating and thereby 3D micro structures are machined automatically. The machining experiments are made about model design, parameters optimizing, and process control. The typical 3D micro structures with space curved surfaces and lines have been machined such as micro prism...