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Keywords: core cluster
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Proceedings Papers

Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 619-622, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70132
... and the electrodepositing speed, copper grain diameter, core cluster as well as square resistivity. Furthermore, testing structures are designed to monitor the process on line. And an observation of fluctuation along the transection has been found which is also increased with the current density. copper...