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Keywords: active isolation system
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Proceedings Papers
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 1149-1155, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21040
... of the work-piece machined by the former better as by the latter. sub-micro ultra-precision turning machine 5 FOG active isolation system vibrati magne isolati electro extern vibrati machi machi the m precis practic fuzzy done turnin has be directi and z alumin precis Proceedings of MNC2007...
