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Keywords: SiC ceramics
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Proceedings Papers

Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 1297-1301, January 10–13, 2007
Paper No: MNC2007-21182
... 11 06 2009 A new super-smooth grinding method for SiC ceramics was proposed by the use of coarse diamond grinding wheel. It can enhance ultra-precision grinding efficiency in comparison with ELID (electrolytic in-process dressing) mirror grinding with super-fine diamond grinding wheel...