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Keywords: Micro-electro-mechanical system
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Proceedings Papers
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 767-771, June 3–5, 2008
Paper No: MicroNano2008-70104
... stability of MEMS products. Micro-electro-mechanical system Artificial neural network Mode classification Failure mechanisms MEMS accelerometers DRA M le P ic n 1 k on neural networks. In ours MEMS accelerometers, there are six failure mechanisms that have of failure network perceptio products...
Proceedings Papers
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 285-290, January 10–13, 2007
Paper No: MNC2007-21078
... micromotor, which is based on the technology of micro-electro-mechanical systems (MEMS). In the center of ring-shaped cavity formed by ICP between the top and bottom glass plates, the rotor is levitated by the five DOFs position servo system and driven by speed control system. In this paper, the mathematical...
