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Keywords: MEMS accelerometers
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Proceedings Papers

Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 767-771, June 3–5, 2008
Paper No: MicroNano2008-70104
... the failure modes and Mechanisms of MEMS accelerometers products and present the classification modeling of failure modes based on neural networks. In ours MEMS accelerometers, there are six failure mechanisms that have been found to be the primary sources of failure nodes. We introduce nonlinear BP network...