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Keywords: Fresnel diffraction micro-lens
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Proceedings Papers

Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 535-538, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21414
... 11 06 2009 A novel MEMS optical acceleration sensor based on a Fresnel diffraction micro-lens is designed in this paper, which is suitable to be used in the fly-by-light system of aviation. The principle of sensor is described. The dynamic performance design of sensor is presented...