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Keywords: Au
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Proceedings Papers

Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 51-54, June 3–5, 2008
Paper No: MicroNano2008-70116
... 11 06 2009 Corrosion of polysilicon occurs during the HF release, which may change the surface morphology, film thickness and even its mechanical strength; furthermore, long time exposure to HF and the presence of Au metallization appear to promote this corrosion. In this paper, clamp...
Proceedings Papers

Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 621-627, January 10–13, 2007
Paper No: MNC2007-21032
... 11 06 2009 The purpose of this paper is to find a reliable method for determining the hardnesses of soft metallic thin films on hard substrates. Based on the nanoindention experimental data for a 504 nm Au thin film deposited on glass substrate system, several possible methods...