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Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 265-271, January 10–13, 2007
Paper No: MNC2007-21046
... 11 06 2009 The work mainly investigates the bonding mechanism of the anodic bonding between glass and aluminium film, and bonding of multi-layers glass-Al stack is achieved by the common anode process. The SEM and EDS are applied to investigate the interfacial structure of Al-glass...