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Keywords: 5 FOG
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Proceedings Papers

Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 1149-1155, January 10–13, 2007
Paper No: MNC2007-21040
... 11 06 2009 For a sub-micro ultra-precision turning machine using airsprings as vibration isolation elements, a 5 FOG mathematical model is established, activation f acted on the machine bed is as the input, the output are vertical displacement y 1 , oscillating φ 1 , ψ 1 around...