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Proceedings Papers

Study of Package Technologies for Implantable Microdevices

Weihong Li, Zhenjiang Shi, Hang Guo, Shiqing Chen, Xiuhan Li, Haixia Zhang
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 167-170, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70194
https://doi.org/10.1115/MicroNano2008-70194
View Paper titled, Study of Package Technologies for Implantable Microdevices
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Topics: Circuits, Packaging, Resonance, Silicones, Thin films
Proceedings Papers

A NEMD Study of the Thermal Conductivity and Surface Roughness of Silicon Thin Films

Tai-Ming Chang, Chien-Chou Weng, Mei-Jiau Huang
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 461-466, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70331
https://doi.org/10.1115/MicroNano2008-70331
View Paper titled, A NEMD Study of the Thermal Conductivity and Surface Roughness of Silicon Thin Films
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Topics: Silicon, Surface roughness, Thermal conductivity, Thin films, Temperature, Atoms, Simulation, Boundary-value problems, Computation, Evaporation
Proceedings Papers

Preparation and Characterization of Pt/WO 3 Nano-Film and Its Hydrogen-Sensing Properties

Changjun Hou, Jiale Dong, Yan Xu, Danqun Huo, Yike Tang, Jun Yang
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 231-236, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70010
https://doi.org/10.1115/MicroNano2008-70010
View Paper titled, Preparation and Characterization of Pt/WO 3 Nano-Film and Its Hydrogen-Sensing Properties
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Topics: Hydrogen, Ions, Tungsten, Crystals, Atomic force microscopy, Catalysts, Electric potential, Membranes, Metal oxide semiconductors, Platinum
Proceedings Papers

Growth and Characterization of PZT Thin Films

Daqun Bao, Yi Zhang, Hang Guo
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 751-755, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70289
https://doi.org/10.1115/MicroNano2008-70289
View Paper titled, Growth and Characterization of PZT Thin Films
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Topics: Thin films, Sol-gel processing, Annealing, Atomic force microscopy, Circuits, Polarization (Electricity), Polarization (Light), Polarization (Waves), Residual stresses, Stress
Proceedings Papers

Electro-Osmotic Flow With Free Surface in Nanochannels

Sang W. Joo, Shizhi Qian, Yingtao Jiang, Marcos A. Cheney
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 543-547, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70302
https://doi.org/10.1115/MicroNano2008-70302
View Paper titled, Electro-Osmotic Flow With Free Surface in Nanochannels
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Topics: Electroosmosis, Flow (Dynamics), Stability, Thin films
Proceedings Papers

A New on Chip Nanomechanical Testing Concept Applied to Brittle and Ductile Thin Films Materials

Thomas Pardoen, Asmahan Safi, Michae¨l Coulombier, Pierre Carbonnelle, Jean-Pierre Raskin, Se´bastien Gravier
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 261-269, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70232
https://doi.org/10.1115/MicroNano2008-70232
View Paper titled, A New on Chip Nanomechanical Testing Concept Applied to Brittle and Ductile Thin Films Materials
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Topics: Brittleness, Testing, Thin films, Fracture (Materials), Fracture (Process), Fracture toughness, Polysilicon, Ductility, Elastic moduli, Silicon nitride ceramics
Proceedings Papers

Study for the Interface Thermal Resistance of Metal-Dielectric Layers

Heng-Chieh Chien, Da-Jen Yao, Cheng-Ting Hsu
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 423-427, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70280
https://doi.org/10.1115/MicroNano2008-70280
View Paper titled, Study for the Interface Thermal Resistance of Metal-Dielectric Layers
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Topics: Metals, Thermal resistance, Adhesion, Aluminum, Fluids, Microelectromechanical systems, Nickel, Plasma-enhanced chemical vapor deposition, Platinum, Thin films
Proceedings Papers

Indentation Mechanics for Micro- and Nano-Layered Composites

G. Tang, Y.-L. Shen
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 289-294, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70038
https://doi.org/10.1115/MicroNano2008-70038
View Paper titled, Indentation Mechanics for Micro- and Nano-Layered Composites
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Topics: Composite materials, Deformation, Silicon, Tension, Aluminum, Ceramics, Computer simulation, Cracking (Materials), Diamonds, Finite element methods
Proceedings Papers

Molecular Dynamics Simulations of Heat Conduction in Thin Film With Nano-Holes

Koji Miyazaki, Daisuke Nagai, Hiroshi Tsukamoto
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 449-454, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70327
https://doi.org/10.1115/MicroNano2008-70327
View Paper titled, Molecular Dynamics Simulations of Heat Conduction in Thin Film With Nano-Holes
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Topics: Heat conduction, Molecular dynamics simulation, Thin films, Phonons, Nanostructures , Temperature, Thermal conductivity, Boundary-value problems, Fourier transforms, Mean free path
Proceedings Papers

Plasma Deposition of Nanometre Thin Coatings Displaying Super Hydrophobic and Oleophobic Properties

Stephen Coulson
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 1661-1662, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21423
https://doi.org/10.1115/MNC2007-21423
View Paper titled, Plasma Deposition of Nanometre Thin Coatings Displaying Super Hydrophobic and Oleophobic Properties
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Topics: Coatings, Plasmas (Ionized gases), Assaying, Glass, Metals, Microfluidics, Optimization, Polymers, Surface energy, Thin films
Proceedings Papers

Coherent Phonon Excitation by Ultrafast Pulse Trains

Alexander Q. Wu, Xianfan Xu
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 955-957, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21591
https://doi.org/10.1115/MNC2007-21591
View Paper titled, Coherent Phonon Excitation by Ultrafast Pulse Trains
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Topics: Excitation, Phonons, Trains, Lasers, Reflectance, Electrons, Dynamics (Mechanics), Oscillations, Separation (Technology), Silicon
Proceedings Papers

PZT Film and Si Substrate Two-Layer System Patterning Morphology by Femtosecond Pulsed Laser

Shizhou Xiao, Rui Guo, Guanghua Cheng, Yalei Wu, Wenhao Huang, Jiaru Chu
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 1309-1314, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21186
https://doi.org/10.1115/MNC2007-21186
View Paper titled, PZT Film and Si Substrate Two-Layer System Patterning Morphology by Femtosecond Pulsed Laser
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Topics: Lasers, Heating, Resolution (Optics), Ablation (Vaporization technology), Chemical etching, Damage, Dry etching, Manufacturing, Microfabrication, Thin films
Proceedings Papers

Femtosecond Laser Pulse Train Effects on Optical Characteristics and Nonequilibrium Energy Transport in Metal Thin Films Considering Quantum Effects

Hyung Sub Sim, Seong Hyuk Lee, Seungho Park, Young Ki Choi, Joon Sik Lee
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 1453-1460, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21420
https://doi.org/10.1115/MNC2007-21420
View Paper titled, Femtosecond Laser Pulse Train Effects on Optical Characteristics and Nonequilibrium Energy Transport in Metal Thin Films Considering Quantum Effects
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Topics: Lasers, Metals, Thin films, Trains, Electrons, Absorption, Collisions (Physics), Phonons, Reflectance, Separation (Technology)
Proceedings Papers

Optical Property Analysis of Microbolometer Based on MEMS

Shibin Li, Zhiming Wu, Naiman Liao, Yadong Jiang, Wei Li, Junsheng Yu
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 259-263, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21039
https://doi.org/10.1115/MNC2007-21039
View Paper titled, Optical Property Analysis of Microbolometer Based on MEMS
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Topics: Cavities, Finite element analysis, Mechanical admittance, Microelectromechanical systems, Resonance, Film thickness, Silicon, Computer software, Matlab, Thin films
Proceedings Papers

Theory of Photoacoustic Characterization of Thermophysical Properties of Multilayered Nanofilms

Hanping Hu, Wei Zhang, Jun Xu, Yi Dong, Xianfan Xu
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 835-844, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21293
https://doi.org/10.1115/MNC2007-21293
View Paper titled, Theory of Photoacoustic Characterization of Thermophysical Properties of Multilayered Nanofilms
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Topics: Accuracy and precision, Geometry, Resonance, Signals, Thermal diffusion, Thin films
Proceedings Papers

Study the Order of Morphology Self-Assembled Triblock Copolymer Thin Films by FFT of the AFM Images

Yongzhi Cao, Shen Dong, Yingchun Liang, Tao Sun, Xuesen Zhao
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 1181-1184, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21063
https://doi.org/10.1115/MNC2007-21063
View Paper titled, Study the Order of Morphology Self-Assembled Triblock Copolymer Thin Films by FFT of the AFM Images
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Topics: Atomic force microscopy, Block copolymers, Copolymers, Self-assembly, Thin films
Proceedings Papers

Image-Based Displacement Measurement System for the Characterization of Mechanical Properties of Thin Films

Jong-Eun Ha, Jun-Hyub Park, Joong-Hyok An, Yun-Jae Kim
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 1649-1653, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21570
https://doi.org/10.1115/MNC2007-21570
View Paper titled, Image-Based Displacement Measurement System for the Characterization of Mechanical Properties of Thin Films
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Topics: Displacement measurement, Mechanical properties, Microelectromechanical systems, Thin films
Proceedings Papers

Fabrication and Test of PECVD SiC Resonator

Yu Wang, Hui Guo, Haixia Zhang, Guobing Zhang, Zhihong Li
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 455-458, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21240
https://doi.org/10.1115/MNC2007-21240
View Paper titled, Fabrication and Test of PECVD SiC Resonator
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Topics: Manufacturing, Plasma-enhanced chemical vapor deposition, Erosion, Annealing, Circuits, Complementary metal oxide semiconductors, Electronics, Etching, High pressure (Physics), High temperature
Proceedings Papers

Characterization of a Micropump Actuated by Ternary TiNiCu Shape Memory Thin Films

Huijun Zhang, Chengjun Qiu
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 123-126, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21321
https://doi.org/10.1115/MNC2007-21321
View Paper titled, Characterization of a Micropump Actuated by Ternary TiNiCu Shape Memory Thin Films
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Topics: Micropumps, Shape memory thin films, Thin films
Proceedings Papers

Fabrication of Nanoscale Linewidth Standards Based on Multilayer Thin Film Deposition Technique

Fengxia Zhao, Weixuan Jing, Zhuangde Jiang, Haoliang Duan
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 335-339, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21105
https://doi.org/10.1115/MNC2007-21105
View Paper titled, Fabrication of Nanoscale Linewidth Standards Based on Multilayer Thin Film Deposition Technique
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Topics: Manufacturing, Nanoscale phenomena, Spectral linewidth, Thin films