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Proceedings Papers

A New Design of Large Stroke Micro-Deformable Mirror Actuated by Electrostatic Repulsive Force

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Fangrong Hu, Jun Yao, Chuankai Qiu, Dajia Wang
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 119-122, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70058
https://doi.org/10.1115/MicroNano2008-70058
View Paper titled, A New Design of Large Stroke Micro-Deformable Mirror Actuated by Electrostatic Repulsive Force
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Topics: Design, Mirrors, Electrodes, Springs, Electric fields, Microelectromechanical systems, Optics, Resonance, Shapes
Proceedings Papers

Manufacture of High Aspect Ratio Bulk Titanium Micro-Parts by Inductively Coupled Plasma Etching

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Gang Zhao, Qiong Shu, Yue Li, Jing Chen
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 605-608, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70125
https://doi.org/10.1115/MicroNano2008-70125
View Paper titled, Manufacture of High Aspect Ratio Bulk Titanium Micro-Parts by Inductively Coupled Plasma Etching
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Topics: Plasma etching, Titanium, Etching, Plasmas (Ionized gases), Springs, Surface roughness
Proceedings Papers

Design of a Non-Powered MEMS High G Shock Sensor

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Y. P. Wang, R. Q. Hsu, C. W. Wu
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 87-96, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70235
https://doi.org/10.1115/MicroNano2008-70235
View Paper titled, Design of a Non-Powered MEMS High G Shock Sensor
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Topics: Design, Microelectromechanical systems, Sensors, Shock (Mechanics), Springs, Cantilever beams, Cantilevers, Simulation
Proceedings Papers

Experimental Investigations on the Nano-Damping Durability

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Claudiu Valentin Suciu
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 7-15, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70018
https://doi.org/10.1115/MicroNano2008-70018
View Paper titled, Experimental Investigations on the Nano-Damping Durability
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Topics: Damping, Durability, Cycles, Filters, Water, Energy dissipation, Particulate matter, Cylinders, Fracture (Materials), Fracture (Process)
Proceedings Papers

Design and Test of Small-Scale Rotary Engine Power System

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Yisheng Liu, Wei Li, Canjun Yang, Ruiyin Song
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 47-51, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21194
https://doi.org/10.1115/MNC2007-21194
View Paper titled, Design and Test of Small-Scale Rotary Engine Power System
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Topics: Design, Engines, Power systems (Machinery), Combustion, Electrical discharge machining, Sealing (Process), Combustion chambers, Construction, Manufacturing, Simulation
Proceedings Papers

Analysis of Micro Fluid Car Suspension System (MFCSS) and Effect of This on Comfort Factor and Life of System

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Neeraj Kumar Singh
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 1123-1129, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21550
https://doi.org/10.1115/MNC2007-21550
View Paper titled, Analysis of Micro Fluid Car Suspension System (MFCSS) and Effect of This on Comfort Factor and Life of System
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Topics: Fluids, Suspension systems, Dampers, Automobiles, Design, Elasticity, Flow (Dynamics), Force control, Magnetic fields, Plasticity
Proceedings Papers

Design of a Micro Tensile Testing Structure to Restrain Non-Axial Alignment Errors

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Duanqin Zhang, Jinkui Chu, Hongyuan Shen
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 635-638, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21184
https://doi.org/10.1115/MNC2007-21184
View Paper titled, Design of a Micro Tensile Testing Structure to Restrain Non-Axial Alignment Errors
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Topics: Design, Errors, Microelectromechanical systems, Springs, Tensile testing, Elastic constants, Microscale devices, Stress, Testing, Engineering simulation
Proceedings Papers

Design and Simulation of Novel MEMS Optical Acceleration Sensor

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Shuhai Jia, Weijun Kong, Jia Yang, Yigui Li
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 535-538, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21414
https://doi.org/10.1115/MNC2007-21414
View Paper titled, Design and Simulation of Novel MEMS Optical Acceleration Sensor
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Topics: Design, Diffraction, Lenses (Optics), Microelectromechanical systems, Sensors, Silicon, Simulation, Springs