1-3 of 3
Plasma-enhanced chemical vapor deposition
Close
Follow your search
Access your saved searches in your account

Would you like to receive an alert when new items match your search?
×Close Modal
Sort by
Proceedings Papers

Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 423-427, June 3–5, 2008
Paper No: MicroNano2008-70280
Proceedings Papers

Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 623-626, June 3–5, 2008
Paper No: MicroNano2008-70136
Proceedings Papers

Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 455-458, January 10–13, 2007
Paper No: MNC2007-21240