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Proceedings Papers

High Isolation X-Band RF MEMS Shunt Switches on Groove Etched Substrates

Li Zhang, Jun Yao, Dajia Wa, Qing Rao, Hongsheng Zhong, Jurgen Schmoll
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 129-130, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70107
https://doi.org/10.1115/MicroNano2008-70107
View Paper titled, High Isolation X-Band RF MEMS Shunt Switches on Groove Etched Substrates
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Topics: Microelectromechanical systems, Switches, Transmission lines, Capacitance, Resonance, Bridges (Structures), Circuits, Computer software, Design, Energy consumption
Proceedings Papers

Modeling and Analysis of Digital Tunable RF MEMS Capacitors

Dajia Wang, Jun Yao, Qing Rao, Li Zhang, Chuankai Qiu, Tianquan Fan
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 85-86, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70226
https://doi.org/10.1115/MicroNano2008-70226
View Paper titled, Modeling and Analysis of Digital Tunable RF MEMS Capacitors
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Topics: Capacitors, Microelectromechanical systems, Modeling, Electrodes, Design, Cantilevers, Transmission lines, Cantilever beams, Capacitance, Displacement
Proceedings Papers

The Influence of Residual Stress and Tip Geometry on the Measurement of Surface Property Using Nanoindentation: Experimental Study and Numerical Analysis

A. W. Warren, Y. B. Guo
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 325-332, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70156
https://doi.org/10.1115/MicroNano2008-70156
View Paper titled, The Influence of Residual Stress and Tip Geometry on the Measurement of Surface Property Using Nanoindentation: Experimental Study and Numerical Analysis
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Topics: Geometry, Nanoindentation, Numerical analysis, Stress, Surface properties, Displacement, Simulation, Carbon steel, Cross section (Physics), Finite element analysis
Proceedings Papers

Finite Element Modeling of Carbon Nanotube Composites for Vibration Damping

R. L. Dai, W. H. Liao
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 333-339, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70165
https://doi.org/10.1115/MicroNano2008-70165
View Paper titled, Finite Element Modeling of Carbon Nanotube Composites for Vibration Damping
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Topics: Carbon nanotubes, Composite materials, Damping, Finite element analysis, Modeling, Vibration, Epoxy resins, Finite element methods, Energy dissipation, Stiffness
Proceedings Papers

Microstructure and Strength of Low Temperature Co-Fired Ceramic Substrates With Channels and Cavities

Yang-Fei Zhang, Min Miao, Yu-Feng Jin, Shu-Lin Bai
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 245-250, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70040
https://doi.org/10.1115/MicroNano2008-70040
View Paper titled, Microstructure and Strength of Low Temperature Co-Fired Ceramic Substrates With Channels and Cavities
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Topics: Bending strength, Cavities, Ceramics, Finite element analysis, Low temperature, Aluminum, Fracture (Materials), Fracture (Process), Simulation, Emission spectroscopy
Proceedings Papers

Design and Analysis of a Novel MEMS Variable Capacitor for RF Applications

Qing Rao, Jun Yao, Li Zhang, Dajia Wang, Mohua Yang
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 205-208, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70263
https://doi.org/10.1115/MicroNano2008-70263
View Paper titled, Design and Analysis of a Novel MEMS Variable Capacitor for RF Applications
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Topics: Capacitors, Design, Microelectromechanical systems, Electrodes, Cantilever beams, Capacitance, Computer software, Elastic constants, Finite element analysis, Q-factor
Proceedings Papers

A Numerical Method for Predicting Thermoelastic Damping in Micromechanical Resonators

Yang Xu, Zhili Hao
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 283-288, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70036
https://doi.org/10.1115/MicroNano2008-70036
View Paper titled, A Numerical Method for Predicting Thermoelastic Damping in Micromechanical Resonators
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Topics: Micromechanical resonators, Numerical analysis, Thermoelastic damping, Computer software, Cycles, Entropy, Finite element analysis, Geometry, Heat conduction, Modeling
Proceedings Papers

Finite Element Analysis Based Design Optimization of Exciting Efficiency for Micromachined Piezoelectric Transducer

Chenguang Cai, Quayle Chen, Dujuan Zeng, Fei Deng, Antti Salo, Leon Xu
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 217-221, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70265
https://doi.org/10.1115/MicroNano2008-70265
View Paper titled, Finite Element Analysis Based Design Optimization of Exciting Efficiency for Micromachined Piezoelectric Transducer
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Topics: Design, Finite element analysis, Micromachining, Optimization, Piezoelectric transducers, Transducers, Membranes, Stress, Diaphragms (Mechanical devices), Diaphragms (Structural)
Proceedings Papers

Laser Direct-Write Micro Dents Using Laser Shock Peening: Experimental Study and Numerical Simulations

M. P. Sealy, Y. B. Guo, C. Dumitrescu, P. V. Puzinauskas, S. C. Chen
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 635-639, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70157
https://doi.org/10.1115/MicroNano2008-70157
View Paper titled, Laser Direct-Write Micro Dents Using Laser Shock Peening: Experimental Study and Numerical Simulations
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Topics: Computer simulation, Laser hardening, Lasers, Aluminum, Engineering simulation, Finite element analysis, Laser materials, Lubricants, Pressure, Residual stresses
Proceedings Papers

Study on Deformation of a Laser Surface Textured Mechanical Seal

Xu-Dong Peng, Song-En Sheng, Ji-Yun Li, Yong-Ning Cai, Shao-Xian Bai
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 79-84, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70186
https://doi.org/10.1115/MicroNano2008-70186
View Paper titled, Study on Deformation of a Laser Surface Textured Mechanical Seal
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Topics: Deformation, Lasers, Leakage, Liquid films, Pressure, Sealing (Process), Stability, Stiffness, Ceramics, Finite element analysis
Proceedings Papers

Numerical Analysis the Strain Distribution of GaN/AlN Self-Organized Pyramid Quantum Dot

Yumin Liu, Zhongyuan Yu
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 681-687, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21370
https://doi.org/10.1115/MNC2007-21370
View Paper titled, Numerical Analysis the Strain Distribution of GaN/AlN Self-Organized Pyramid Quantum Dot
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Topics: Gallium nitride, Numerical analysis, Quantum dots, Anisotropy, Elastic constants, Density, Finite element analysis, Reliability, Simulation
Proceedings Papers

Optical Property Analysis of Microbolometer Based on MEMS

Shibin Li, Zhiming Wu, Naiman Liao, Yadong Jiang, Wei Li, Junsheng Yu
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 259-263, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21039
https://doi.org/10.1115/MNC2007-21039
View Paper titled, Optical Property Analysis of Microbolometer Based on MEMS
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Topics: Cavities, Finite element analysis, Mechanical admittance, Microelectromechanical systems, Resonance, Film thickness, Silicon, Computer software, Matlab, Thin films
Proceedings Papers

Finite Element and Experimental Analysis on Micro-Vibration of Ultra Precision Air Bearing Linear Motion Stage and Methods of Its Elimination

Ming Zhang, Yu Zhu, Gexue Ren, Guanghong Duan, Guohua Gao
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 83-87, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21253
https://doi.org/10.1115/MNC2007-21253
View Paper titled, Finite Element and Experimental Analysis on Micro-Vibration of Ultra Precision Air Bearing Linear Motion Stage and Methods of Its Elimination
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Topics: Air bearings, Experimental analysis, Finite element analysis, Finite element methods, Vibration
Proceedings Papers

The Electronic Structure of Truncated-Conical Shaped InAs/GaAs Quantum Dot With Wetting Layers

Yumin Liu, Zhongyuan Yu, Xiaomin Ren
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 575-579, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21539
https://doi.org/10.1115/MNC2007-21539
View Paper titled, The Electronic Structure of Truncated-Conical Shaped InAs/GaAs Quantum Dot With Wetting Layers
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Topics: Electron configuration, Gallium arsenide, Quantum dots, Wetting, Electrons, Finite element analysis, Optoelectronic devices, Potential barrier, Semiconductors (Materials)
Proceedings Papers

Research of Nanometer Positioning Stage With Six Degree of Freedom Based on Binary Actuation Principle

Shufeng Sun
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 1639-1647, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21429
https://doi.org/10.1115/MNC2007-21429
View Paper titled, Research of Nanometer Positioning Stage With Six Degree of Freedom Based on Binary Actuation Principle
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Topics: Actuators, Degrees of freedom, Hinges, Piezoelectric ceramics, Finite element analysis, Feedback, Bending (Stress), Design, Displacement, Rails