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Proceedings Papers

Failure Investigation and Analysis of Abnormal Capacitance of Accelerometer After ICP Release

Ping An, Yandong He, Shitao Wang, Yanping Bai, Yilong Hao
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 677-681, June 3–5, 2008
Paper No: MicroNano2008-70201
DOI: https://doi.org/10.1115/MicroNano2008-70201
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Topics: Accelerometers, Capacitance, Failure, Contamination, Epoxy resins, Etching, Failure analysis, Inspection, Plasmas (Ionized gases), Polishing
Proceedings Papers

Optical Feedback Interferometry and Its Application in MEMS Sensing

Huilan Liu, Yong Wang, Zaiyou Pan, Lishuang Feng
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 149-153, June 3–5, 2008
Paper No: MicroNano2008-70137
DOI: https://doi.org/10.1115/MicroNano2008-70137
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Topics: Feedback, Interferometry, Microelectromechanical systems, Accelerometers, Lasers, Testing, Helium-neon lasers, Interferometers, Light sources, Microoptoelectromechanical systems
Proceedings Papers

Failure Modes Model of MEMS Accelerometers Based on Neural Networks

Yanping Bai, Ping An, Yilong Hao
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 767-771, June 3–5, 2008
Paper No: MicroNano2008-70104
DOI: https://doi.org/10.1115/MicroNano2008-70104
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Topics: Accelerometers, Artificial neural networks, Failure mechanisms, Microelectromechanical systems
Proceedings Papers

Optimization in Design of High-g Accelerometers

Jun Liu, Xiaojin Qi, Yunbo Shi, Fai Ma
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 469-474, January 10–13, 2007
Paper No: MNC2007-21277
DOI: https://doi.org/10.1115/MNC2007-21277
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Topics: Accelerometers, Design, Optimization, Shock (Mechanics)
Proceedings Papers

Multi-Objective Optimization for a Novel Electrostatic-Feedback Micro-Sensor Based on Genetic Algorithm

Yongquan Wang, Hualing Chen, Zhiying Ou, Xueming He
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 21-26, January 10–13, 2007
Paper No: MNC2007-21169
DOI: https://doi.org/10.1115/MNC2007-21169
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Topics: Feedback, Genetic algorithms, Microsensors, Pareto optimization, Optimization, Accelerometers, Algorithms, Damping, Design, Dynamic models
Proceedings Papers

A Bulk Micromachined Si-on-Glass Tunneling Accelerometer

Min Miao, Qifang Hu, Yilong Hao, Haifeng Dong, Haixia Zhang
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 505-512, January 10–13, 2007
Paper No: MNC2007-21349
DOI: https://doi.org/10.1115/MNC2007-21349
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Topics: Accelerometers, Glass, Inertia (Mechanics), Micromachining, Resolution (Optics), Tunnel construction
Proceedings Papers

Research on Micro Accelerometer Array

Jijun Xiong, Haiyang Mao, Wendong Zhang, Dong Xu, Tao Guo
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 517-521, January 10–13, 2007
Paper No: MNC2007-21385
DOI: https://doi.org/10.1115/MNC2007-21385
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Topics: Accelerometers
Proceedings Papers

A High G Accelerometer Based on SOI Piezoresistive Material With Cantilever Beam

Yulong Zhao, Libo Zhao, Jianzhong Gao, Zhuangde Jiang
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 143-147, January 10–13, 2007
Paper No: MNC2007-21518
DOI: https://doi.org/10.1115/MNC2007-21518
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Topics: Accelerometers, Cantilever beams, Silicon-on-insulator