This paper presents an instrument for measuring the mechanical properties of MEMS materials by both nanoindentation and micro-beam-bending tests. The nanoindentation test requires high resolution within a very small displacement range, whereas the micro-beam-bending test needs relatively large displacement range but lower resolution. Though, for both tests, loading with small increment is necessary. In order to satisfy different requirements and yet save cost, a two-stage system driven by a PZT actuator in the first stage and by a DC-Mike Linear motor in the second stage is designed and built. The instrument achieves a displacement resolution better than 1 nm within a range of 50 microns in the first stage and the maximum output displacement is over 1 mm in the second stage. The measurement accuracy is validated through experiments.
- Nanotechnology Institute
An Instrument for Measuring Mechanical Properties of MEMS Materials by Nanoindentation and Micro-Beam-Bending
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Wang, H, Zhao, Z, Jiang, Z, & Du, R. "An Instrument for Measuring Mechanical Properties of MEMS Materials by Nanoindentation and Micro-Beam-Bending." Proceedings of the 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems. First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B. Sanya, Hainan, China. January 10–13, 2007. pp. 693-698. ASME. https://doi.org/10.1115/MNC2007-21421
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