This paper presents an instrument for measuring the mechanical properties of MEMS materials by both nanoindentation and micro-beam-bending tests. The nanoindentation test requires high resolution within a very small displacement range, whereas the micro-beam-bending test needs relatively large displacement range but lower resolution. Though, for both tests, loading with small increment is necessary. In order to satisfy different requirements and yet save cost, a two-stage system driven by a PZT actuator in the first stage and by a DC-Mike Linear motor in the second stage is designed and built. The instrument achieves a displacement resolution better than 1 nm within a range of 50 microns in the first stage and the maximum output displacement is over 1 mm in the second stage. The measurement accuracy is validated through experiments.
Skip Nav Destination
2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
January 10–13, 2007
Sanya, Hainan, China
Conference Sponsors:
- Nanotechnology Institute
ISBN:
0-7918-4265-7
PROCEEDINGS PAPER
An Instrument for Measuring Mechanical Properties of MEMS Materials by Nanoindentation and Micro-Beam-Bending Available to Purchase
Hairong Wang,
Hairong Wang
Xi’an Jiaotong University, Xi’an, China; Chinese University of Hong Kong, Shatin, Hong Kong
Search for other works by this author on:
Zexiang Zhao,
Zexiang Zhao
Zhongyuan Institute of Technology, Zhengzhou, China
Search for other works by this author on:
Zhuangde Jiang,
Zhuangde Jiang
Xi’an Jiaotong University, Xi’an, China
Search for other works by this author on:
R. Du
R. Du
Chinese University of Hong Kong, Shatin, Hong Kong
Search for other works by this author on:
Hairong Wang
Xi’an Jiaotong University, Xi’an, China; Chinese University of Hong Kong, Shatin, Hong Kong
Zexiang Zhao
Zhongyuan Institute of Technology, Zhengzhou, China
Zhuangde Jiang
Xi’an Jiaotong University, Xi’an, China
R. Du
Chinese University of Hong Kong, Shatin, Hong Kong
Paper No:
MNC2007-21421, pp. 693-698; 6 pages
Published Online:
June 8, 2009
Citation
Wang, H, Zhao, Z, Jiang, Z, & Du, R. "An Instrument for Measuring Mechanical Properties of MEMS Materials by Nanoindentation and Micro-Beam-Bending." Proceedings of the 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems. First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B. Sanya, Hainan, China. January 10–13, 2007. pp. 693-698. ASME. https://doi.org/10.1115/MNC2007-21421
Download citation file:
5
Views
Related Proceedings Papers
Related Articles
Nanoindentation Size Effects in Lithiated and Sodiated Battery Electrode Materials
J. Appl. Mech (July,2022)
In-Situ Nanoindentation Hardness Apparatus for Mechanical Characterization of Extremely Thin Films
J. Tribol (July,1988)
Mechanics of Crystalline Nanowires: An Experimental Perspective
Appl. Mech. Rev (January,2017)
Related Chapters
Surface Analysis and Tools
Tribology of Mechanical Systems: A Guide to Present and Future Technologies
Effect of Temperature and Irradiation on the Hardness of δ-Zr Hydride
Zirconium in the Nuclear Industry: 20th International Symposium
Process Components
Bioprocessing Piping and Equipment Design: A Companion Guide for the ASME BPE Standard