In this paper, micro-tube fabricated from SiO2/Si3N4 strained composite structures using a self-scrolling procedure is presented. This fabrication is a self-organization process using stress of bifilm. This technique is based on self-rolling of a thin highly strained SiO2/ Si3N4 bifilm detached from the substrate by TMAH selective etching. The material of bifilm and the solution for anisotropic etching are in common use, so this method can be widely used in the future.

Volume Subject Area:
Micro and Nano Systems
Keywords:
Micro-tube, TMAH, Si3N4, Anisotropic etching
Topics:
Anisotropy, Etching
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