Palladium-MOS hydrogen sensors have wide applications in the industries. This paper presents a novel design and development of a hydrogen sensor and sensor array based on MOS capacitor structure. An empirical model for sensors’ response to hydrogen concentrations is established and validated. Experimental results demonstrate that the sensor is highly sensitive to hydrogen gas, is capable of not only hydrogen leaks detection, but leaks location, and gas distribution monitoring.
Volume Subject Area:
Micro and Nano Devices
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Copyright © 2007
by ASME
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