A novel MEMS optical acceleration sensor based on a Fresnel diffraction micro-lens is designed in this paper, which is suitable to be used in the fly-by-light system of aviation. The principle of sensor is described. The dynamic performance design of sensor is presented. The constant of silicon micro spring and natural frequency is calculated by using the numerical simulator (ANSYS 8.0) of finite element method. Because the design of the sensor integrates a Fresnel diffraction lens, the optical throughput is high, which brings the advantage of higher signal-to-noise ratio with respect to photon noise. The design of the sensor is well suitable for mass production with normal process of MEMS a low cost. The proof-of-Principle fabrication and experiments show that the principle of this new MEMS optical acceleration sensor is correct.

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