A novel doubly decoupled bulk micromachined lateral gyroscope, proposed in our former work, can efficiently suppress the undesired mechanical coupling, while remaining symmetric in structure. Both theoretical simulations and experiments are carried out to analyze the decoupling property of this gyroscope. The simulated results show that the driving and sensing mode frequencies are 3.821 kHz and 3.956 kHz, respectively. Furthermore, the displacements of the driving mode and sensing mode are also simulated by ANSYS™. In driving mode, simulation result shows that the mechanical coupling from the driving mode to sensing mode is 8%. Similarly, in sensing mode, the mechanical coupling from the sensing mode to driving mode is 0.9%. Micro Laser Doppler vibration meter is employed to detect mechanical coupling in the sensing mode. The test result is about 2%, close to the simulated value.
- Nanotechnology Institute
Simulation and Test of a Doubly Decoupled Lateral Axis Gyroscope
- Views Icon Views
- Share Icon Share
- Search Site
Liu, X, Lv, B, Yang, Z, Ding, H, & Yan, G. "Simulation and Test of a Doubly Decoupled Lateral Axis Gyroscope." Proceedings of the 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems. First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B. Sanya, Hainan, China. January 10–13, 2007. pp. 501-504. ASME. https://doi.org/10.1115/MNC2007-21309
Download citation file: