Macromodeling Method of Fluid-Structure Interacting MEMS Based on Modal Analysis and Proper Orthogonal Decomposition

Because of their good performance to speed up MEMS system simulation processes, macromodels have aroused lots of attentions of scientists in the last decades. However, studies on FSI (Fluid-Structure Interaction) MEMS devices still can not satisfy the macromodeling requests because of the high complexity of fluid fields. A new method based on modal analysis and POD (Proper Orthogonal Decomposition) is tentatively put forward to reduce the order of FSI MEMS models. The structure macromodeling theory is firstly reviewed. Then the fluid field macromodeling approach is discussed in detail. At last, a 2D fixed-fixed micro-beam is analyzed and the results show that the macromodel extracted in this method can highly decrease the system degrees of freedom, while its precision is still comparable with that of detailed models.