Tunnel-effect MEMS gyroscopes have broad applications in astronautics because they have high sensitivity, low measurement ranges, and small volumes. This paper describes the design of a novel orthogonal-beam gyroscope based on the principle of tunnel effect. The mathematical model of this class of gyroscopes is set up and the associated performance is obtained with ANSYS simulation software. Related MEMS technology for the construction of these orthogonal-beam tunnel-effect gyroscopes is also described.
- Nanotechnology Institute
An Orthogonal-Beam Tunnel-Effect MEMS Gyroscope
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Liu, J, Luo, Y, Li, J, Shi, Y, & Ma, F. "An Orthogonal-Beam Tunnel-Effect MEMS Gyroscope." Proceedings of the 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems. First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B. Sanya, Hainan, China. January 10–13, 2007. pp. 465-468. ASME. https://doi.org/10.1115/MNC2007-21270
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