In this paper piezoelectric composites are presented for advanced micro and nano electromechanical devices. The properties of piezoelectric composites (1-3 and 2-2 connectivity) were analyzed and a micromachining process for bulk piezo materials deep etching was developed for piezoelectric composites fabrication. As an example, micromachined piezoelectric composites with center frequency of 20–50 MHz were prototyped. The micro-piezoelectric composites were characterized showing unprecedented properties for high frequency ultrasound imaging and M/NEMS applications.
- Nanotechnology Institute
Micro/Nano Piezoelectric Composites for Advanced M/NEMS
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Jiang, X, Yuan, JR, Cheng, A, Snook, K, & Hackenberger, W. "Micro/Nano Piezoelectric Composites for Advanced M/NEMS." Proceedings of the 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems. First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B. Sanya, Hainan, China. January 10–13, 2007. pp. 415-420. ASME. https://doi.org/10.1115/MNC2007-21181
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