A novel micro gripper integrating tri-axial force sensor and two grades displacement amplifier is presented in this paper, which bases on the technology of Piezoresistive detection and use PZT as its micro driving component. The micro tri-axial force sensor is fabricated on a single-crystalline-silicon by the technology of MEMS and consists of a flexible cross-structure realized by deep reactive ion etching (DRIE). The arms of the cross-structure are connected to a silicon frame and to the central part of the cross-structure. After modeling the amplifier structure of micro gripper and the sensor, finite element method (FEM) is used to analyze the displacement of the micro gripper and the deformation of the cross-structure elastic cantilever. A calibration method of tri-axial sensor based on the technology of microscopic vision and the principle of bending deflection cantilever is proposed. The experimental verified that the sensor are high level of intrinsic decoupling of the signals from strain gauge, high resolutions in all three axes, high linearity and repeatability and simple produce of calculation. And also show the micro gripper is reasonable and practical. The sensor is capable of resolving forces up to 10mN with resolution of 2.4μN in x axis and y axis and up to 10mN with resolution of 4.2μN in z axis; the gripping displacement of the micro gripper is from 20μm to 300μm.
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2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
January 10–13, 2007
Sanya, Hainan, China
Conference Sponsors:
- Nanotechnology Institute
ISBN:
0-7918-4265-7
PROCEEDINGS PAPER
Development of a Novel Micro-Gripper Integrating Tri-Axial Force Sensor
Jiachou Wang,
Jiachou Wang
Harbin Institute of Technology, Harbin, Heilongjiang, China
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Weibin Rong,
Weibin Rong
Harbin Institute of Technology, Harbin, Heilongjiang, China
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Lining Sun,
Lining Sun
Harbin Institute of Technology, Harbin, Heilongjiang, China
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Hui Xie,
Hui Xie
Harbin Institute of Technology, Harbin, Heilongjiang, China
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Wei Chen
Wei Chen
Harbin Institute of Technology, Harbin, Heilongjiang, China
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Jiachou Wang
Harbin Institute of Technology, Harbin, Heilongjiang, China
Weibin Rong
Harbin Institute of Technology, Harbin, Heilongjiang, China
Lining Sun
Harbin Institute of Technology, Harbin, Heilongjiang, China
Hui Xie
Harbin Institute of Technology, Harbin, Heilongjiang, China
Wei Chen
Harbin Institute of Technology, Harbin, Heilongjiang, China
Paper No:
MNC2007-21035, pp. 249-254; 6 pages
Published Online:
June 8, 2009
Citation
Wang, J, Rong, W, Sun, L, Xie, H, & Chen, W. "Development of a Novel Micro-Gripper Integrating Tri-Axial Force Sensor." Proceedings of the 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems. First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B. Sanya, Hainan, China. January 10–13, 2007. pp. 249-254. ASME. https://doi.org/10.1115/MNC2007-21035
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