Forced Response of Electromechanical Integrated Electrostatic Harmonic Drive to Voltage Excitation

In this paper, a micro electromechanical integrated electrostatic harmonic drive system is presented. The operating principle of the MEMS is introduced. The exciting electric field force under exciting voltage is given. Based on the electromechanical coupled dynamic equations of the drive system, by generalized force and generalized coordinate, the forced response of the drive system to voltage excitation are obtained. The forced frequency responses of the drive system to voltage excitation are investigated. Changes of the frequency response along with the system parameters are given as well.