Research of Nanometer Positioning Stage With Six Degree of Freedom Based on Binary Actuation Principle

To adapt the miniaturized development tendency of nanometer positioning devices, a new type of micro-displacement stage with six degree of freedom, which can implement nanometer-level ultra-precision positioning without feedback control is designed. It takes a group of piezoelectric ceramics actuators (PZTAs) connected in series as actuation unit, takes flexure hinges as elastic guide rail. To overcome the non-linearity and hysteresis of PZTAs, binary actuation principle is adopted to control a group of actuators that work together to output many discrete, repeatable displacements. If these displacements are distributed within a scope of several microns, only simple on and off actuator commands may obtain nanometer-level repeatable positioning without feedback control. Theoretical calculation and finite element analysis (FEA) are used to design and simulate the stage. Expressions of rigidity and stress are obtained by theoretical calculation. FEA and experimental results verify the rationality and feasibility of the stage.